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SPARE PARTS

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AMAT

AMAT 0010-23726 DPS CERAMIC WFR LIFT PIN ASSY

NT$46,000

AMAT

AMAT 0190-01404 SERIPLEX VME CONTROL BOARD

NT$56,000

AMAT

AMAT 0100-20100 PCB, ANALOG I/O AIO BD

NT$28,600

AMAT

AMAT 0100-38083 PCB CHAMBER INTERCONNECT A-C, CENTURA

NT$6,000

SPARE PARTS

AMAT P/N : 0020-40450 SHAFT,Z-DRIVE DLL

NT$75,071

AMAT

AMAT P/N : 0040-33998, LINER, SLIT LINER DOOR

NT$160,000

AMAT

AMAT 200mm producer chamber body , P/N : 0040-53932

NT$220,000

AMAT

AMAT FE GUI PC 0090-08212 / FI PC 0090-08217 / RT PC 0090-08218

NT$77,000

AMAT

AMAT 0021-70047 YOKE RIGHT ENP CENTURA LID LIFT D.E. RO

NT$3,000

AMAT

AMAT 0190-63777 ASSY DUAL AXIS DRIVER ELE 200MM VHP+

NT$460,000

AMAT

AMAT 0021-70046 YOKE LEFT ENP CENTURA LID LIFT D.E. RO

NT$3,000

AMAT

AMAT 3870-02890 VALVE AIR-OPEN SPR-CL 1.5OD NW40 180DEG

NT$25,900

AE

AMAT 0090-01419 AE 3155094-003 FIXED MATCH (LONG HANDLE)

NT$107,300

AMAT

AMAT 0770-01022 WFR CASSETTE METAL 150MM

NT$21,500

AMAT

AMAT 0020-03658 CLAMPING CYLINDER OXIDE

NT$26,300

AMAT

AMAT 0010-09857 ASSEMBLY, THROTTLE VALVE,SMALL SIGMA

NT$12,000